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▣ Features and Applications |
- A high compaction efficiency of 99.9999999% at 0.05§ |
- Compaction efficiency (99.999999% at 0.1§) |
- Applicable to the class-1 of semiconductor production process |
- Use of corrosion-resistant AL frame |
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< SUPER ULPA FILTER > |
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▣ Performance |
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▣ Performance Curve |
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▣ Material & Usage Conditions |
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▣ Standard Specifications |
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▣ Efficiency Curve by Particle Size |
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¡Ø The products different from the above sizes can be ordered for customized production. |
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