▣ Features and Applications
- A high compaction efficiency of 99.9999999% at 0.05§­
- Compaction efficiency (99.999999% at 0.1§­)
- Applicable to the class-1 of semiconductor production process
- Use of corrosion-resistant AL frame

< SUPER ULPA FILTER >
▣ Performance
▣ Performance Curve
▣ Material & Usage Conditions
▣ Standard Specifications
▣ Efficiency Curve by Particle Size
 
¡Ø The products different from the above sizes can be ordered for customized production.